A 3-DOF SOI MEMS ultrasonic energy harvester for implanted devices
- Creator: Fowler, A. G. , Moheimani, S. O. R. , Behrens, S.
- Resource Type: conference paper
- Date: 2013
Control of a MEMS nanopositioner for atomic force microscopy
- Creator: Yong, Y. K. , Fowler, A. G. , Mohammadi, A. , Moheimani, S. O. R.
- Resource Type: conference paper
- Date: 2013
A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM
- Creator: Fowler, A. G. , Laskovski, A. N. , Hammond, A. C. , Moheimani, S. O. R.
- Resource Type: journal article
- Date: 2012